6. Flatness of working face: Grade 0 (Grade II): ≤ 0.03um; Grade 1 (Grade III): ≤ 0.05um; Grade 2 (Grade 4): ≤ 0.1 um; [Customized class 00 (first class): ≤ 0.02 um;]

7,Flatness of datum plane: Grade 0 (Grade II): ≤ 1um; Grade 1 (Grade III): ≤ 1.5 um; Grade 2 (Grade 4): ≤ 1.5 um; [Customized Grade 00 (Grade I): ≤ 1um;]

8,Verticality of working surface to datum plane: Grade 0 (Grade II): ≤ ± 10 ″; Grade 1 (Grade III): ≤ ± 15 ″; Grade 2 (Grade 4): ≤ ± 20 ″; [Customized Grade 00 (Grade I): ≤ ± 5 ″;]

9. Surface roughness of working face: Ra ≤ 0.025um;

10. Surface roughness of datum plane: Ra ≤ 0.05 um;

11. Parallelism between the upper surface and the datum plane: 2 um;

12. Working angle deviation: Grade 0 (Grade II): ≤ ± 1 ″; Grade 1 (Grade 3): ≤ ± 2 ″; Grade 2 (Grade 4): ≤ ± 5 ″; [Customized Grade 00 (Grade I): ≤ ± 0.5 ″;]

13. Measurement uncertainty of working angle: Class 0 (Class II): ≤ 0.3 ″; Grade 1 (Grade III): ≤ 0.5 ″; Grade 2 (Grade 4): ≤ 1.0 ″; [Customized level 00 (first class): ≤ 0.2 ″;]

14,Effective working area of working face: circular area with S ≥ φ15mm (or 15mm * 15mm or D15mm);

parameters

Name	Model	Specification	Precision	Manufacturing deviation of working angle	Circumscribed circle diameter	Flatness of working surface	Verticality between working surface and positioning surface	Surface roughness of working surface Ra
8-sided prism	LT-8	8 sides	Level 0	±1″	Φ80mm	0.03μm	±10″	≤0.025
			Level I	±2″		0.05μm	±15″
12-sided prism	LT-12	12 sides	Level 0	±1″	Φ100mm	0.03μm	±10″	≤0.025
			Level I	±2″		0.05μm	±15″
17-sided prism	LT-17	17 sides	Level 0	±1″	Φ100mm	0.03μm	±10″	≤0.025
			Level I	±2″		0.05μm	±15″
23-sided prism	LT-23	23 sides	Level 0	±1″	Φ120mm	0.03μm	±10″	≤0.025
			Level I	±2″		0.05μm	±15″
24-sided prism	LT-24	24 sides	Level 0	±1″	Φ120mm	0.03μm	±10″	≤0.025
			Level I	±2″		0.05μm	±15″
36-sided prism	LT-36	36 sides	Level 0	±1″	Φ150mm	0.03μm	±10″	≤0.025
			Level I	±2″		0.05μm	±15″

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